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Parker Solutions for the Semiconductor Industry
Precision motion and UHP control for cleaner, faster tools
From wafer handling to gas and chemical delivery, Parker’s semiconductor technologies help fabs and OEMs improve throughput, yield, and uptime. In-Position Technologies (IP Tech) integrates Parker motion, fluid, and filtration solutions into high-performance semiconductor tools—delivering proven reliability and cleanroom compatibility.
Motion, Gas, and Chemical Control Expertise
• Cleanroom Motion Systems – Linear and rotary stages, controllers, and mechatronic subsystems designed for ISO-class cleanrooms.
• UHP Gas & Chemical Delivery – Parker Veriflo regulators, valves, and fittings ensure stability from bulk supply to point-of-use.
• Integrated Performance – Combined motion and fluid control minimizes process variation in lithography, CMP, coating, and ECD applications.
Typical Applications
• Wafer stages and aligners
• Lithography pneumatics
• UHP gas cabinets and valve manifolds
• Chemical and slurry delivery modules
Key Parker Technologies
FR-Series UHP Regulators – High-flow stainless steel pressure control for semiconductor gases.
SMSQ2 Micro Regulators – Ultra-compact surface-mount designs for tight tool bays.
Cleanroom-Validated Stages – Linear motor platforms and gantries built for precision and low contamination.
Partner with IP Tech
Whether you’re building a new tool or upgrading existing subsystems, IP Tech can size, specify, and support a Parker-based solution that meets your cleanroom and process requirements.
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