Air Bearing Motion Systems

ALIO Industries has developed leading edge 6-D Nano Positioning air bearing motion systems for a wide range of applications in manufacturing, inspection/repair and metrology. With several patent pending designs for Planar and Nano Z, ALIO is well positioned for the next generation application demands of TRUE NANO precision in PV, Semiconductor, Ink Jet Deposition, Lithography and Optical Inspection.

• The ALIO Industries Nano-Precision Planar Air Bearing System has raised the bar to a new level of performance for air bearing motion.
• This engineered system was designed to exceed today’s demanding requirements in semiconductor wafer, flat panel display, nano-manufacturing and optical inspection.

When starting any new automation project, In-Position Technologies engineers start by reviewing the key requirements to determine all necessary components needed in an application. This includes providing recommendations for any appropriate controllers, power supplies, sensors, encoders, bearings, couplings, and any other components needed to fit the application. Our engineers perform all necessary engineering assessments to make sure all components perform properly together, are within customer specifications, and do not come with unnecessary costs.

This includes:

• Payload, reach, speed, cycle time, and repeatability requirement
• Specifying the appropriate feedback device (sensors, vision system, torque sensor)
• Verifying mounting compatibility, form factor checks, etc.
• Ensuring compatibility with the current system
• Ensuring all necessary auxiliary equipment are also specified

When ordering Air Bearing Motion Systems as a part of a full system, IP Tech engineers review the solution to ensure:

• All parts and fittings necessary for a complete working solution are included
• All components have been checked and verified to work together as a system
• The selected components will perform as required by the project specifications